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The present invention relates to a semiconductor device having a silicon-on-insulator structure and a method of manufacturing the semiconductor device.
۲٫ Description of the Related Art
Hitherto, a SOI structure has been known which has a monocrystalline silicon layer formed on an insulating layer. To be specific, the SOI structure is a structure in which a Si layer is bonded to an insulating film. However, this SOI structure has a problem in that the bonding strength between the Si layer and the insulating film is not sufficient and the Si layer is peeled off the insulating film.
On the other hand, a FIB (Focused Ion Beam) technique is known as a technique of forming a sample of a SOI structure. The FIB technique is carried out by irradiating a sample with a beam of Ga+ ions or O+ ions and then measuring the optical emission amount by a micro secondary electron detector provided on a path of the Ga+ ions or O+ ions.
However, the FIB technique has a problem in that it is impossible to know the depth of an ion beam penetrated into the sample, that is, the depth of the sample irradiated by the ion beam.
Accordingly, a technique of bonding a diaphragm to a semiconductor layer and controlling the width of an ion beam is disclosed (Jpn. Pat. Appln. KOKAI Publication No. 2001-332976).
However, the technique disclosed in KOKAI Publication No. 2001-332976 has a problem in that the ion beam irradiation process requires extremely long time.Game Of Throne Chair Game Chair Thrones
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